This course provides students an introduction to the development of nanotechnology, the related fabrication and
self-organization processes, and the concepts and principles of nanoanalytical methods. This course is presented in a
lecture/discussion format. The content of the course includes silicon fab process, chemical vapor deposition, atomic
layer deposition, chemical origin of silica defects, lithography, metallization, process technology, self-assembly,
organic silicon interface, low-dimensional periodic array, surface modification, organic thin-film transistors,
single-crystal field effect transistor, ion-selective field effect transistor, organic transistor, biomineralization, nanolight,
nanosized optical sensor, nanosphere lithography, energy and charge transfer, subwavelength diameter wire, micro
machining, micro electro mechanical system, ferroelectric thin film, pressure sensor, temperature sensor, stirling-cycle
cooler, micro-relay, infusion pump, actuator, accelerometer, thruster, silicon microreactor, micro total analysis system,
micromachined transductor, carbon nanotube, photocatalysts, scanning electron microscope, scanning probe
microscopy, transmission electron microscopy, photoelectron spectroscopy, Auger electron spectroscopy, chemical
mapping, surface plasmon resonance, depth profiling,